Silicon processing for the VLSI era (Book, 1986) [UNC Charlotte Libraries]
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Silicon processing for the VLSI era

Author: Stanley Wolf; Richard N Tauber
Publisher: Sunset Beach, Calif. : Lattice Press, ©1986-©1995.
Edition/Format:   Print book : EnglishView all editions and formats
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Details

Document Type: Book
All Authors / Contributors: Stanley Wolf; Richard N Tauber
ISBN: 0961672137 9780961672133 0961672145 9780961672140
OCLC Number: 14258223
Notes: UNC Charlotte Libraries notes:
v. 1. Process technology -- v. 2 Process integration -- v. 3. The submicron MOSFET -- v. 4. Deep-submicron process technology.
#14258223xJU1088
Description: 3 volumes : illustrations ; 25 cm
Contents: v. 1. Process technology --
v. 2. Process integration --
v. 3. The Submicron MOSFET --
v. 4. Deep-submicron process technology.
Responsibility: Stanley Wolf, Richard N. Tauber.
Local System Bib Number:
.b10299853
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